4 inch High purity Al2O3 99.999% Sapphire substrate wafer Dia101.6×0.65mmt with Primary Flat Length
Description
Common specifications of 4-inch sapphire wafers are introduced as follows:
Thickness: The thickness of common sapphire wafers is between 0.2 mm and 2 mm, and the specific thickness can be customized according to customer requirements.
Placement Edge: There is usually a small section at the edge of the wafer called the "placement edge" that protects the wafer surface and edge, and is usually amorphous.
Surface preparation: Common sapphire wafers are mechanically ground and chemically mechanically polished to smooth the surface.
Surface properties: The surface of sapphire wafers usually has good optical properties, such as low reflectivity and low refractive index, to improve device performance.
Applications
● Growth substrate for III-V and II-VI compounds
● Electronics and optoelectronics
● IR applications
● Silicon On Sapphire Integrated Circuit(SOS)
● Radio Frequency Integrated Circuit(RFIC)
Specification
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Item |
4-inch C-plane(0001) 650μm Sapphire Wafers |
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Crystal Materials |
99,999%, High Purity, Monocrystalline Al2O3 |
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Grade |
Prime, Epi-Ready |
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Surface Orientation |
C-plane(0001) |
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C-plane off-angle toward M-axis 0.2 +/- 0.1° |
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Diameter |
100.0 mm +/- 0.1 mm |
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Thickness |
650 μm +/- 25 μm |
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Primary Flat Orientation |
A-plane(11-20) +/- 0.2° |
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Primary Flat Length |
30.0 mm +/- 1.0 mm |
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Single Side Polished |
Front Surface |
Epi-polished, Ra < 0.2 nm (by AFM) |
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(SSP) |
Back Surface |
Fine ground, Ra = 0.8 μm to 1.2 μm |
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Double Side Polished |
Front Surface |
Epi-polished, Ra < 0.2 nm (by AFM) |
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(DSP) |
Back Surface |
Epi-polished, Ra < 0.2 nm (by AFM) |
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TTV |
< 20 μm |
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BOW |
< 20 μm |
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WARP |
< 20 μm |
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Cleaning / Packaging |
Class 100 cleanroom cleaning and vacuum packaging, |
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25 pieces in one cassette packaging or single piece packaging. |
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We have many years of experience in the sapphire processing industry. Including the Chinese supplier market, as well as the international demand market. If you have any needs, please feel free to contact us.
Detailed Diagram
