50.8mm/100mm AlN Template on NPSS/FSS AlN template on sapphire

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AlN-On-Sapphire refers to a combination of materials in which aluminum nitride films are grown on Sapphire substrates. In this structure, high quality aluminum nitride film can be grown by chemical vapor deposition (CVD) or organometrical chemical vapor deposition (MOCVD), which makes the aluminum nitride film and sapphire substrate have a good combination. The advantages of this structure are that aluminum nitride has high thermal conductivity, high chemical stability and excellent optical properties, while sapphire substrate has excellent mechanical and thermal properties and transparency.

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AlN-On-Sapphire

AlN-On-Sapphire can be used to make a variety of photoelectric devices, such as:
1. LED chips: LED chips are usually made of aluminum nitride films and other materials. The efficiency and stability of leds can be improved by using AlN-On-Sapphire wafers as the substrate of LED chips.
2. Lasers: AlN-On-Sapphire wafers can also be used as substrates for lasers, which are commonly used in medical, communications, and materials processing.
3. Solar cells: The manufacture of solar cells requires the use of materials such as aluminum nitride. AlN-On-Sapphire as a substrate can improve the efficiency and life of solar cells.
4. Other optoelectronic devices: AlN-On-Sapphire wafers can also be used to manufacture photodetectors, optoelectronic devices, and other optoelectronic devices.

In conclusion, AlN-On-Sapphire wafers are widely used in the opto-electrical field due to their high thermal conductivity, high chemical stability, low loss and excellent optical properties.

50.8mm/100mm AlN Template on NPSS/FSS

Item	Remarks
Description	AlN-on-NPSS template	AlN-on-FSS template
Wafer diameter	50.8mm, 100mm
Substrate	c-plane NPSS	c-plane Planar Sapphire (FSS)
Substrate Thickness	50.8mm, 100mmc-plane Planar Sapphire (FSS)100mm : 650 um
Thickness of AIN epi-layer	3~4 um (target: 3.3um)
Conductivity	Insulating
Surface	As grown
	RMS<1nm	RMS<2nm
Backside	Grinded
FWHM(002)XRC	< 150 arcsec	< 150 arcsec
FWHM(102)XRC	< 300 arcsec	< 300 arcsec
Edge Exclusion	< 2mm	< 3mm
Primary flat orientation	a-plane+0.1°
Primary flat length	50.8mm: 16+/-1 mm 100mm: 30+/-1 mm
Package	Packaged in shipping box or single wafer container