Dia300x1.0mmt Thickness Sapphire Wafer C-Plane SSP/DSP

Short Description:

Shanghai Xinkehui New Material Co., Ltd. can produce sapphire wafers with various surface orientations (c, r, a, and m-plane), and control the off-cut angle to within 0.1 degree. Using our proprietary technology, we are able to achieve the high quality needed for such applications as epitaxial growth and wafer bonding.

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Product Detail

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Introduce of wafer box

Crystal Materials	99,999% of Al2O3,High Purity, Monocrystalline, Al2O3
Crystal quality	Inclusions, block marks, twins, Color, micro-bubbles and dispersal centers are non-existent
Diameter	2inch	3inch	4inch	6inch ～ 12inch
Diameter	50.8± 0.1mm	76.2±0.2mm	100±0.3mm	In accordance with the provisions of standard production
Thickness	430±15µm	550±15µm	650±20µm	Can be customized by customer
Orientation	C- plane (0001) to M-plane (1-100) or A-plane(1 1-2 0) 0.2±0.1° /0.3±0.1°, R-plane (1-1 0 2), A-plane (1 1-2 0 ), M-plane(1-1 0 0), Any Orientation , Any angle
Primary flat length	16.0±1mm	22.0±1.0mm	32.5±1.5 mm	In accordance with the provisions of standard production
Primary flat Orientation	A-plane (1 1-2 0 ) ± 0.2°
TTV	≤10µm	≤15µm	≤20µm	≤30µm
LTV	≤10µm	≤15µm	≤20µm	≤30µm
TIR	≤10µm	≤15µm	≤20µm	≤30µm
BOW	≤10µm	≤15µm	≤20µm	≤30µm
Warp	≤10µm	≤15µm	≤20µm	≤30µm
Front Surface	Epi-Polished (Ra< 0.2nm)

*Bow: The deviation of the center point of the median surface of a free, un-clamped wafer from the reference plane, where the reference plane is defined by the three corners of an equilateral triangle.

*Warp: The difference between the maximum and the minimum distances of the median surface of a free, un-clamped wafer from the reference plane defined above.

High-quality products and services for next-generation semiconductor devices and epitaxial growth:

High degree of flatness (controlled TTV, bow, warp etc.)

High-quality cleaning (low particle contamination, low metal contamination)

Substrate drilling, grooving, cutting, and backside polishing

Attachment of data such as cleanliness and shape of substrate (optional)

If you have a need for sapphire substrates, please feel free to contact：

mail：eric@xkh-semitech.com +86 158 0194 2596 /doris@xkh-semitech.com +86 187 0175 6522

We will back to you asap!