High-Performance Silicon Carbide Ceramic Tray with CVD SiC Coating – Customized Sizes for Semiconductor Fabrication and Aerospace Applications

Short Description:

Our High-Performance Silicon Carbide Ceramic Trays with CVD SiC coating are engineered to offer outstanding thermal stability, mechanical strength, and chemical resistance for high-temperature sintering and semiconductor fabrication. These trays are made from pure silicon carbide (SiC), providing excellent thermal conductivity, low thermal expansion, and resistance to harsh conditions. The CVD SiC coating further enhances the tray’s performance by offering thermal shock resistance, wear protection, and improved chemical resistance. Customizable in size and shape, these trays are the perfect choice for industries requiring high precision and durability, such as semiconductor manufacturing, aerospace, and advanced materials production.

Send email to us

Product Detail

Product Tags

Features

1.Customizable Sizes and Shapes: The trays can be tailored to meet your specific requirements, offering a perfect fit for a wide range of applications and equipment.
2.High Thermal Conductivity: Silicon carbide offers excellent thermal conductivity, allowing for efficient heat distribution and consistent temperature control during sintering and semiconductor processing.
3.CVD SiC Coating: The CVD SiC coating improves thermal shock resistance, wear resistance, and corrosion resistance, ensuring the tray’s longevity and reliability in demanding environments.
4.Mechanical Strength: These trays exhibit exceptional flexural strength and compressive strength, providing durability and the ability to support heavy loads without deformation.
5.Low Thermal Expansion: The trays have a low coefficient of thermal expansion, ensuring dimensional stability under varying temperature conditions, which is critical for high-precision applications.
6.Chemical Resistance: Highly resistant to a wide range of chemicals, these trays are suitable for use in chemical processing and other applications that involve aggressive substances.
7.Maximum Working Temperature: These trays can withstand temperatures up to 1500°C, making them suitable for high-temperature sintering processes in industries such as advanced ceramics production.conductor manufacturing, aerospace, and advanced materials production.

Applications

●Semiconductor Fabrication: Used for supporting silicon wafers and other sensitive materials during processes like oxidation, diffusion, and epitaxy.
●High-Temperature Sintering: Essential for producing advanced ceramics and other materials that require sintering at extreme temperatures.
●Chemical Processing: Suitable for use in chemical reactors, reaction vessels, and distillation systems, where chemical resistance is critical.
●Aerospace: Employed in aerospace components for their lightweight and high-strength properties, especially in thermal management applications.
●Advanced Materials Production: Used in industries that require precise material handling and temperature control, including in the production of optical components and ceramic coatings.

Product Parameters

Feature	Specification
Material	Silicon Carbide (SiC), CVD SiC Coating
Density	3.12g/cm³
Hardness	≥92 HRA
Thermal Conductivity	110 W/m·K
Flexural Strength	359 MPa
Compressive Strength	≥2200 MPa
Max. Working Temperature	1500°C
Coefficient of Thermal Expansion	4.0 x 10^-6/°C
Applications	Semiconductor, Aerospace, Chemical Processing, High-Temperature Sintering
Customization	Available in Custom Sizes and Shapes

Q&A (Frequently Asked Questions)

Q1: How does the CVD SiC coating benefit the ceramic trays?

A1: The CVD SiC coating provides enhanced wear resistance, thermal shock resistance, and chemical durability, making these trays more robust and reliable for high-temperature and aggressive chemical environments.

Q2: Can these trays be used for semiconductor fabrication?

A2: Yes, these trays are ideal for semiconductor fabrication, where they support silicon wafers during processes like oxidation, diffusion, and epitaxy, maintaining precision and durability throughout the fabrication process.

Q3: How high of a temperature can these trays withstand?

A3: The trays can withstand temperatures up to 1500°C, making them suitable for high-temperature sintering and other applications requiring thermal resistance.

Q4: Are these trays customizable?

A4: Yes, these trays can be customized to specific sizes and shapes to meet your application’s unique requirements.

Q5: What industries benefit from using these silicon carbide ceramic trays?

A5: These trays are widely used in semiconductor manufacturing, aerospace, chemical processing, materials production, and other high-precision industries where thermal stability, mechanical strength, and chemical resistance are critical.